Chemical Vapor Deposition (CVD) is a method by introducing precursor substances (usually organic compounds or metal organic compounds) in the reaction gas into the reaction chamber, and causing them to thermally decompose or chemically react at high temperatures to form The reaction product is deposited onto the substrate to form a thin film. This method can be used to prepare industrial furnaces for heating materials such as metals, alloys, semiconductors and ceramics.
It is widely used in the following industries and product manufacturing:
Civil aviation carbon brake disc
Carbon-carbon thermal field materials for single crystal silicon growth furnace
Carbon-carbon thermal field materials for polycrystalline silicon hydrogenation furnaces
Carbon-carbon thermal field materials for polycrystalline silicon ingot furnaces and PECVD furnaces
Carbon-carbon high temperature structural materials
Carbon-carbon high temperature structural part…